Visible to the public Development Of Micro-Magnets For The Electromagnetic Transduction Of MEMS

TitleDevelopment Of Micro-Magnets For The Electromagnetic Transduction Of MEMS
Publication TypeConference Paper
Year of Publication2019
AuthorsMoritz, Pierre, Mathieu, Fabrice, Bourrier, David, Saya, Daisuke, Blon, Thomas, Hasselbach, Klaus, Kramer, Roman, Nicu, Liviu, Lacroix, Lise-Marie, Viau, Guillaume, Leïchlé, Thierry
Conference Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems Eurosensors XXXIII (TRANSDUCERS EUROSENSORS XXXIII)
Date Publishedjun
Keywordscantilevers, Co, cobalt, cobalt nanorod, cobalt nanorods, coercive force, compositionality, controlled assembly, electromagnetic induction, electromagnetic MEMS sensor, electromagnetic transduction, Electromagnetics, high coercive field, high-performance permanent micromagnets, Integrated MEMS, Lorentz force, Magnetic field measurement, magnetic hysteresis, Magnetic Induction, magnetic resonance imaging, magnetic sensors, MEMS, micromagnetics, Micromechanical devices, nanofabrication, nanomagnetics, nanorods, nanosensors, nanostructured micromagnets, permanent magnet, Permanent magnets, pubcrawl, remanence, Resiliency, Saturation magnetization, saturation magnetization ratio, scanning Hall effect micro-probe microscopy, Self-assembly, signal-noise ratio, silicon microcantilevers, sub-millimeter size magnets
AbstractThis paper presents a new class of high-performance permanent micro-magnets based on the controlled assembly of cobalt nanorods for the electromagnetic transduction of MEMS. Micromagnets are fabricated using a low temperature fabrication process that yields a dense material exhibiting high coercive field and remanence to saturation magnetization ratio. The cartography of the magnetic induction produced by the sub-millimeter size magnets was obtained using a scanning Hall effect micro-probe microscope. Silicon microcantilevers placed in the vicinity of these magnets were successfully actuated using the Lorentz force with low currents. The good signal to noise ratio measured at resonance demonstrates the potentiality of these nanostructured micro-magnets.
Citation Keymoritz_development_2019