Visible to the public Investigating Long-Term Stability of Wide Bandwidth Surface Acoustic Waves Gyroscopes Using a Monolithically Integrated Micro-Oven

TitleInvestigating Long-Term Stability of Wide Bandwidth Surface Acoustic Waves Gyroscopes Using a Monolithically Integrated Micro-Oven
Publication TypeConference Paper
Year of Publication2020
AuthorsMahmoud, A., Mukherjee, T., Piazza, G.
Conference Name2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Date Publishedjan
Keywordsacoustic coupling, frequency stability, Frequency Stabilization, gyroscope, gyroscopes, Human Behavior, Inertial sensor, lithium compounds, long-term stability, MEMS, MEMS-based gyroscopes, Micromechanical devices, micromechanical resonators, microsensors, monolithic integration, monolithically integrated microoven, ovenization, ovenized control system, Piezoelectric, pubcrawl, Resiliency, SAW, SAWG resonance frequency, Scalability, surface acoustic wave devices, surface acoustic wave sensors, Surface acoustic waves, temperature 10.0 muK, thermal control, tightly couples frequency-based temperature detection, wide bandwidth Surface Acoustic waves Gyroscopes
AbstractThis paper is the first to investigate the long-term stability of Surface Acoustic Wave Gyroscopes (SAWG) using an ovenized control system. Monolithic integration of a MEMS heater adjacent to SAW devices on Lithium Niobate over insulator substrate (LNOI) tightly couples frequency-based temperature detection with heating for temperature and frequency stabilization. This first prototype demonstrates the ability to minimize the temperature variations of the SAWG to below ±10 μK and stabilize the SAWG resonance frequency to ±0.2 ppm. This approach thus eliminates the thermal drift in a SAWG and enables the development of a new generation of MEMS-based gyroscopes with long-term stability.
DOI10.1109/MEMS46641.2020.9056180
Citation Keymahmoud_investigating_2020