Visible to the public Biblio

Filters: Keyword is microsensors  [Clear All Filters]
Lisec, Thomas, Bodduluri, Mani Teja, Schulz-Walsemann, Arne-Veit, Blohm, Lars, Pieper, Isa, Gu-Stoppel, Shanshan, Niekiel, Florian, Lofink, Fabian, Wagner, Bernhard.  2019.  Integrated High Power Micro Magnets for MEMS Sensors and Actuators. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems Eurosensors XXXIII (TRANSDUCERS EUROSENSORS XXXIII). :1768–1771.
Back-end-of-line compatible integration of NdFeB-based micro magnets onto 8 inch Si substrates is presented. Substrate conditioning procedures to enable further processing in a cleanroom environment are discussed. It is shown that permanent magnetic structures with lateral dimensions between 25μm and 2000μm and a depth up to 500μm can be fabricated reliably and reproducibly with a remanent magnetization of 340mT at a standard deviation as low as 5% over the substrate. To illustrate post-processing capabilities, the fabrication of micro magnet arrangements embedded in silicon frames is described.
Hu, Jizhou, Qu, Hemi, Guo, Wenlan, Chang, Ye, Pang, Wei, Duan, Xuexin.  2019.  Film Bulk Acoustic Wave Resonator for Trace Chemical Warfare Agents Simulants Detection in Micro Chromatography. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems Eurosensors XXXIII (TRANSDUCERS EUROSENSORS XXXIII). :45–48.
This paper reported the polymer coated film bulk acoustic resonators (FBAR) as a sensitive detector in micro chromatography for the detection of trace chemical warfare agents (CWA) simulants. The FBAR sensor was enclosed in a microfluidic channel and then coupled with microfabricated separation column. The subsequent chromatographic analysis successfully demonstrated the detection of parts per billion (ppb) concentrations of chemical warfare agents (CWAs) simulants in a five components gas mixture. This work represented an important step toward the realization of FBAR based handheld micro chromatography for CWA detection in the field.
Pawlenka, T., Škuta, J..  2018.  Security system based on microcontrollers. 2018 19th International Carpathian Control Conference (ICCC). :344–347.
The article describes design and realization of security system based on single-chip microcontrollers. System includes sensor modules for unauthorized entrance detection based on magnetic contact, measuring carbon monoxide level, movement detection and measuring temperature and humidity. System also includes control unit, control panel and development board Arduino with ethernet interface connected for web server implementation.