MULTI -MODEL LANGUAGE SUITE FOR CYBER PHYSICAL SYSTEMS The META design flow and tools are built around the META Language, labeled the Cyber Physical Modeling Language (CyPhy). CyPhy is a model integration language which integrates models from different domains in a semantically sound manner that enables reasoning for correctness of models and modeling languages. This report describes the development of the CyPhy and related specifications and tools under the META Language contract (FA8650-10-C-7075). Sandeep Neema, Ted Bapty, Janos Sztipanovits Institute for Software Integrated Systems, Vanderbilt University