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Cyber-Physical Systems Virtual Organization
Fostering collaboration among CPS professionals in academia, government, and industry
CPS-VO
Aluminum Nitride
biblio
A Review of the Approaches to Improve The Effective Coupling Coefficient of AlN based RF MEMS Resonators
Submitted by aekwall on Mon, 12/21/2020 - 12:33pm
Scalability
Resiliency
Human behavior
pubcrawl
Micromechanical devices
acoustic resonators
AlN
aluminium compounds
bulk acoustic wave devices
III-V semiconductors
wide band gap semiconductors
Aluminum Nitride
Couplings
crystal resonators
Resonators
acoustic coupling
micromechanical resonators
2D lateral wave
communication applications
effective coupling coefficient
III-V semiconductor materials
Lateral wave
nonbulk acoustic wave aluminum nitride
Optical filters
piezoelectric MEMS resonators
radiofrequency filters
resonator
Resonator filters
RF MEMS
RF MEMS resonators
two-dimensional lateral wave
vertical wave
biblio
On the Coupling Coefficient of ScyAl1-yN-based Piezoelectric Acoustic Resonators
Submitted by aekwall on Mon, 01/13/2020 - 11:07am
Scalability
Resiliency
Human behavior
pubcrawl
Market research
Film bulk acoustic resonators
acoustic resonators
aluminium compounds
Aluminum Nitride
bulk acoustic wave devices
scandium compounds
aluminum scandium nitride
CLMR
CLMRs
Couplings
cross-sectional-Lamé-mode
crystal resonators
doping profiles
electromechanical coupling coefficient
FBAR
FBARs
film-bulk-acoustic-resonators
Films
Lamb Wave Theory.
lithographically defined resonators
piezoelectric acoustic resonator
Resonators
scandium
scandium doping concentrations
ScyAl1-yN
acoustic coupling
biblio
Single Crystalline Scandium Aluminum Nitride: An Emerging Material for 5G Acoustic Filters
Submitted by aekwall on Mon, 01/13/2020 - 11:07am
Scalability
Resiliency
Human behavior
pubcrawl
5G mobile communication
piezoelectric materials
5G acoustic filters
5G resonators
acoustic filters
acoustic resonators
AlN
aluminium compounds
Aluminum Nitride
bulk acoustic wave devices
bulk acoustic wave resonators
electromechanical coupling
emerging material
Film bulk acoustic resonators
film thickness
filter bandwidth
filtering applications
form factor
frequency 3.0 GHz to 10.0 GHz
high crystal quality
high electromechanical coupling
high-performance filters
high-quality single-crystalline
III-V semiconductors
material candidate
next generation wireless communication devices
operation frequencies
Piezoelectric devices
piezoelectric material needs
Q-factor
quality factors
RF front-end
SC
scandium
scandium compounds
Scandium Doping
semiconductor growth
Si
Single Crystalline
single-crystal
size 400.0 nm
sputter deposition
sputtering techniques
steep skirts
sub-micron ranges
surface acoustic wave devices
thin films
ultra-thin films
wide band gap semiconductors
acoustic coupling
