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National Science Foundation

Cyber-Physical Systems Virtual Organization

Fostering collaboration among CPS professionals in academia, government, and industry

CPS-VO

crystal resonators

biblio

Visible to the public A Review of the Approaches to Improve The Effective Coupling Coefficient of AlN based RF MEMS Resonators

Submitted by aekwall on Mon, 12/21/2020 - 12:33pm
  • Scalability
  • Resiliency
  • Human behavior
  • pubcrawl
  • Micromechanical devices
  • acoustic resonators
  • AlN
  • aluminium compounds
  • bulk acoustic wave devices
  • III-V semiconductors
  • wide band gap semiconductors
  • Aluminum Nitride
  • Couplings
  • crystal resonators
  • Resonators
  • acoustic coupling
  • micromechanical resonators
  • 2D lateral wave
  • communication applications
  • effective coupling coefficient
  • III-V semiconductor materials
  • Lateral wave
  • nonbulk acoustic wave aluminum nitride
  • Optical filters
  • piezoelectric MEMS resonators
  • radiofrequency filters
  • resonator
  • Resonator filters
  • RF MEMS
  • RF MEMS resonators
  • two-dimensional lateral wave
  • vertical wave
biblio

Visible to the public On the Coupling Coefficient of ScyAl1-yN-based Piezoelectric Acoustic Resonators

Submitted by aekwall on Mon, 01/13/2020 - 11:07am
  • Scalability
  • Resiliency
  • Human behavior
  • pubcrawl
  • Market research
  • Film bulk acoustic resonators
  • acoustic resonators
  • aluminium compounds
  • Aluminum Nitride
  • bulk acoustic wave devices
  • scandium compounds
  • aluminum scandium nitride
  • CLMR
  • CLMRs
  • Couplings
  • cross-sectional-Lamé-mode
  • crystal resonators
  • doping profiles
  • electromechanical coupling coefficient
  • FBAR
  • FBARs
  • film-bulk-acoustic-resonators
  • Films
  • Lamb Wave Theory.
  • lithographically defined resonators
  • piezoelectric acoustic resonator
  • Resonators
  • scandium
  • scandium doping concentrations
  • ScyAl1-yN
  • acoustic coupling

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