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Cyber-Physical Systems Virtual Organization
Fostering collaboration among CPS professionals in academia, government, and industry
CPS-VO
micromechanical resonators
biblio
A Review of the Approaches to Improve The Effective Coupling Coefficient of AlN based RF MEMS Resonators
Submitted by aekwall on Mon, 12/21/2020 - 12:33pm
Scalability
Resiliency
Human behavior
pubcrawl
Micromechanical devices
acoustic resonators
AlN
aluminium compounds
bulk acoustic wave devices
III-V semiconductors
wide band gap semiconductors
Aluminum Nitride
Couplings
crystal resonators
Resonators
acoustic coupling
micromechanical resonators
2D lateral wave
communication applications
effective coupling coefficient
III-V semiconductor materials
Lateral wave
nonbulk acoustic wave aluminum nitride
Optical filters
piezoelectric MEMS resonators
radiofrequency filters
resonator
Resonator filters
RF MEMS
RF MEMS resonators
two-dimensional lateral wave
vertical wave
biblio
Investigating Long-Term Stability of Wide Bandwidth Surface Acoustic Waves Gyroscopes Using a Monolithically Integrated Micro-Oven
Submitted by aekwall on Mon, 12/21/2020 - 12:32pm
Scalability
Resiliency
Human behavior
pubcrawl
microsensors
surface acoustic wave devices
surface acoustic wave sensors
acoustic coupling
SAW
MEMS
Micromechanical devices
lithium compounds
Surface acoustic waves
frequency stability
Frequency Stabilization
gyroscope
gyroscopes
Inertial sensor
long-term stability
MEMS-based gyroscopes
micromechanical resonators
monolithic integration
monolithically integrated microoven
ovenization
ovenized control system
Piezoelectric
SAWG resonance frequency
temperature 10.0 muK
thermal control
tightly couples frequency-based temperature detection
wide bandwidth Surface Acoustic waves Gyroscopes
