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Cyber-Physical Systems Virtual Organization
Fostering collaboration among CPS professionals in academia, government, and industry
CPS-VO
nonbulk acoustic wave aluminum nitride
biblio
A Review of the Approaches to Improve The Effective Coupling Coefficient of AlN based RF MEMS Resonators
Submitted by aekwall on Mon, 12/21/2020 - 12:33pm
Scalability
Resiliency
Human behavior
pubcrawl
Micromechanical devices
acoustic resonators
AlN
aluminium compounds
bulk acoustic wave devices
III-V semiconductors
wide band gap semiconductors
Aluminum Nitride
Couplings
crystal resonators
Resonators
acoustic coupling
micromechanical resonators
2D lateral wave
communication applications
effective coupling coefficient
III-V semiconductor materials
Lateral wave
nonbulk acoustic wave aluminum nitride
Optical filters
piezoelectric MEMS resonators
radiofrequency filters
resonator
Resonator filters
RF MEMS
RF MEMS resonators
two-dimensional lateral wave
vertical wave
