Skip to Main Content Area
CPS-VO
Contact Support
Browse
Calendar
Announcements
Repositories
Groups
Search
Search for Content
Search for a Group
Search for People
Search for a Project
Tagcloud
› Go to login screen
Not a member?
Click here to register!
Forgot username or password?
Cyber-Physical Systems Virtual Organization
Fostering collaboration among CPS professionals in academia, government, and industry
CPS-VO
nonbulk acoustic wave aluminum nitride
biblio
A Review of the Approaches to Improve The Effective Coupling Coefficient of AlN based RF MEMS Resonators
Submitted by aekwall on Mon, 12/21/2020 - 12:33pm
micromechanical resonators
vertical wave
two-dimensional lateral wave
RF MEMS resonators
RF MEMS
Resonator filters
resonator
radiofrequency filters
piezoelectric MEMS resonators
Optical filters
nonbulk acoustic wave aluminum nitride
Lateral wave
III-V semiconductor materials
effective coupling coefficient
communication applications
2D lateral wave
Scalability
acoustic coupling
Resonators
crystal resonators
Couplings
Aluminum Nitride
wide band gap semiconductors
III-V semiconductors
bulk acoustic wave devices
aluminium compounds
AlN
acoustic resonators
Micromechanical devices
pubcrawl
Human behavior
Resiliency
